Automatic Film Thickness Measurement Device KV-300 / KF-10
High-precision measurement of thick film resist and polyimide up to 500μm thick without contact.
The KV-300/KF-10 automatic resist film thickness measurement device can perform high-precision non-contact measurements of ultra-thick resist films, which have traditionally been difficult to measure with stability. The standard automatic mapping function quickly displays the in-plane film thickness distribution of the substrate using a high-precision automatic stage. The KV-300 features an automatic R-θ stage, allowing it to accommodate 300mm substrates while minimizing its footprint. For more details, please contact us or refer to the catalog.
- Company：リソテックジャパン
- Price：Other
